Composition dependence of dielectric and optical properties of Hf-Zr-silicate thin films grown on Si(100) by atomic layer deposition

Dahlang Tahir, Suhk Kun Oh, Hee Jae Kang, Sven Mosbæk Tougaard

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

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OriginalsprogEngelsk
TidsskriftThin Solid Films
Vol/bind616
Sider (fra-til)425-430
ISSN0040-6090
DOI
StatusUdgivet - 2016

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title = "Composition dependence of dielectric and optical properties of Hf-Zr-silicate thin films grown on Si(100) by atomic layer deposition",
author = "Dahlang Tahir and Oh, {Suhk Kun} and Kang, {Hee Jae} and Tougaard, {Sven Mosb{\ae}k}",
year = "2016",
doi = "10.1016/j.tsf.2016.09.001",
language = "English",
volume = "616",
pages = "425--430",
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Composition dependence of dielectric and optical properties of Hf-Zr-silicate thin films grown on Si(100) by atomic layer deposition. / Tahir, Dahlang; Oh, Suhk Kun; Kang, Hee Jae; Tougaard, Sven Mosbæk.

I: Thin Solid Films, Bind 616, 2016, s. 425-430.

Publikation: Bidrag til tidsskriftTidsskriftartikelForskningpeer review

TY - JOUR

T1 - Composition dependence of dielectric and optical properties of Hf-Zr-silicate thin films grown on Si(100) by atomic layer deposition

AU - Tahir, Dahlang

AU - Oh, Suhk Kun

AU - Kang, Hee Jae

AU - Tougaard, Sven Mosbæk

PY - 2016

Y1 - 2016

U2 - 10.1016/j.tsf.2016.09.001

DO - 10.1016/j.tsf.2016.09.001

M3 - Journal article

VL - 616

SP - 425

EP - 430

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -