Applications of laboratory hard X-ray photoelectron spectroscopy on buried interfaces in devices are presented. We use a novel spectrometer fitted with a monochromated CrKα source (photon energy: 5414.9 eV) and a high-voltage analyzer. Elements buried at depths as deep as 25 nm underneath various overlayers such as Al/Ta and Pt/Ti are detected and quantified from survey spectra, with chemical shifts accessible from high-resolution scans. Different analysis conditions towards optimizing the information depth are presented and discussed.
|Tidsskrift||Surface and Interface Analysis|
|Status||Udgivet - nov. 2018|
|Begivenhed||17th European Conference on Applications of Surface and Interface Analysis - Montpellier, Frankrig|
Varighed: 24. sep. 2017 → 29. sep. 2017
|Konference||17th European Conference on Applications of Surface and Interface Analysis|
|Periode||24/09/2017 → 29/09/2017|