Alloy sputtering at high fluence: preferential sputtering and competing effects

Publikation: Bidrag til tidsskrift › Tidsskriftartikel › Forskning › peer review

Originalsprog	Engelsk
Tidsskrift	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Vol/bind	82
Udgave nummer	2
Sider (fra-til)	269-282
ISSN	0168-583X
DOI	https://doi.org/10.1016/0168-583x(93)96029-c
Status	Udgivet - 1993

Dokumenter og links

@article{3b222dcee1f8438eb3c8916741b433fa,

title = "Alloy sputtering at high fluence: preferential sputtering and competing effects",

author = "P. Sigmund and A. Oliva",

year = "1993",

doi = "10.1016/0168-583x(93)96029-c",

language = "English",

volume = "82",

pages = "269--282",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Alloy sputtering at high fluence: preferential sputtering and competing effects

AU - Sigmund, P.

AU - Oliva, A.

PY - 1993

Y1 - 1993

U2 - 10.1016/0168-583x(93)96029-c

DO - 10.1016/0168-583x(93)96029-c

M3 - Journal article

SN - 0168-583X

VL - 82

SP - 269

EP - 282

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 2

ER -