Self-activating and Self-limiting Features of the Thermally Assisted Growth Mechanisms of Thin Oxide-, Nitride-, and Carbide Films on Si Surfaces at Low Gas or Plasma Pressure

Morgen, P. (Foredragsholder)

Aktivitet: Foredrag og mundtlige bidragForedrag og præsentationer i privat eller offentlig virksomhed

Periode28. okt. 20122. nov. 2012
BegivenhedstitelAVS 59th International Symposium and Exhibition
BegivenhedstypeKonference
PlaceringTampa, Fl., USA